Murata has developed a new MEMS (Micro-Electro-Mechanical Systems) inclinometer, which has best in class stability and offset performance over its lifetime and temperature. The new SCL3400 provides two measurement axis and digital SPI communication interface. The sensor offers user-selectable measurement modes of ±30° with 10 Hz measurement bandwidth and ±90° with 40 Hz measurement bandwidth and excellent offset stability (Typical offset drift over lifetime ≤ 0.12°). The unique New MEMS structures have been developed for this product and the double-differential structure with multiple moving masses compensates many non-ideal error sources. It is an ideal sensor for the industrial equipment markets. This product is under development and mass production starts in June 2022, samples are already available.

The sensor was developed also to replace our industry proven one-axis analog high performance inclinometer (SCA103T) which has provided precise angle information around the globe for various applications. The SCL3400 sensor element and ASIC are packaged into 12 pin pre-moulded plastic housing (measuring 8.6 × 7.6 × 3.3 mm) that guarantees reliable operation over product's entire lifetime. The SCL3400 sensor consumes only 2mA during operation which makes it also an excellent choice for battery powered applications. The SCL3400 complements Murata’s sensor portfolio and it is fully pin compatible with our SCA3300 accelerometer and SCL3300 inclinometer. Replacing or combining sensors with existing PCB design is easy and opens possibilities for different use cases with e.g. wider measurement ranges.

(source : Murata)